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We have developed a new method which enables us to atomically control the height and the periodicity of the step distribution on vicinal SrTiO 3 (100) substrates. This method also enables us to obtain precipitate-free epitaxy of oxides. Practically thick YBa 2 Cu 3 O 7−δ films grown on such terraced vicinal substrates exhibited a regular epitaxial growth, and smooth...
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