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Mechanical properties were detected by the nanoindentation method for the Cu–Ta amorphous films with Ta content from 25.6 to 96at.%. The hardness and elastic modulus are found to vary linearly with the Ta concentration. The incremental change of the elastic modulus is 1.35GPa per Ta atom and that of the hardness is 0.205GPa per Ta atom. The samples with Ta content higher than 71at.% have higher elastic...
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