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The internal stress, film density and dynamic deposition rate of amorphous tin oxide (SnO 2 ) films were investigated as a function of the carbon dioxide (CO 2 ) gas flow ratio [CO 2 /(O 2 +CO 2 )] during sputter deposition. The internal stress and film density decreased with higher CO 2 gas flow ratios. The dynamic deposition rate increased 1.6-fold...
The effects of a metal oxide under-layer on the resistivity of a Ag layer were investigated. Ag-based multilayers, which have a layer construction of glass/ZnO under-layer/Ag/ZAO (Al-doped ZnO) blocker/ZnO top layer, were deposited by DC magnetron sputtering with changing the sputter gas pressure during the under-layer deposition and it was confirmed that the Ag layer showed low resistivity when the...
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