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Substitutional tungsten doping of VO2 thin films and its effect on the metal-to-insulator transition are investigated by Cs-corrected scanning transmission electron microscopy (STEM), and ab initio simulations. The W0.02V0.98O2 thin films deposited on (001) sapphire are studied in both planar and transverse geometries. The tungsten atoms are distinguishable from the V atoms in the Z-sensitive high...
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