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This research investigates the role of substrate temperature on crystallographic structure, surface morphology, and subsequently ammonia gas sensing performance of Mg-doped ZnO thin films as a breath analysis device. The Mg-doped ZnO thin films were deposited by spray pyrolysis technique on glass substrates at different temperatures (125 °C, 250 °C, 375 °C, and 500 °C). Crystallographic structure,...
This paper studies the effect of deposition angle on the crystallographic structure, surface morphology, porosity and subsequently ethanol vapor sensing performance of e-beam-evaporated WO3 thin films. The WO3 thin films were deposited by e-beam evaporation technique on SiO2/Si substrates under different deposition angles (0°, 30°, and 60°) and then post-annealed at 500 °C with a flow of oxygen for...
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