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The semiconductor industry is facing constant overlay challenge posed by tighter overlay error budget and the increase of multi-patterning layers in 14nm node and beyond. While the allowed total measurement uncertainty (TMU) for Overlay metrology is already extremely low due to the ever tightening overlay budget, discrepancies between optical overlay results and electrical test data raise the inaccuracy...
The semiconductor industry is facing constant overlay challenge posed by tighter overlay error budget and the increase of multi-patterning layers in 14nm node and beyond. While the allowed total measurement uncertainty (TMU) for Overlay metrology is already extremely low due to the ever tightening overlay budget, discrepancies between optical overlay results and electrical test data raise the inaccuracy...
In this paper, we propose and demonstrate a phase-stabilized radio-frequency (RF) reference transmission scheme by actively stabilizing the optical path delay of the fiber link. The reference RF tone is round-trip transferred between the central station and the remote end to obtain the delay variation. The fast and small part of the delay fluctuation is cancelled by a piezoelectric fiber stretcher,...
We present a new pose estimation method from line correspondences and introduce a new iterative method for it. The iterative method works fast. In some cases, the process of search satisfies the monotony character which is the premise for convergence of iterative method. Especially, we introduce one monotony region and provide a detailed account of the proof of monotony at this region. The value of...
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