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Thin films of ferroelectrics in combination with superconducting YBa 2 Cu 3 O 7- (YBCO) find application in tuneable microwave components. The crystalline quality of the ferroelectric films directly affects the tunability and microwave losses of these components. In the present work, SrTiO 3 thin films ≤ 300 nm in thickness were deposited by rf sputtering...
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