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This paper reports the preparation and characterization of thin films of Al-Ti mixed oxides. Films of different compositions ranging from a cationic content of Ti of 92.6% to 18.8% (i.e. Al/Ti ratios from 0.08 to 4.3) have been prepared by ion beam induced CVD (IBICVD). The films have been characterized by different methods including UV-VIS spectroscopy, XRD and X-ray absorption spectroscopy (XAS)...
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