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Diamond films have been grown using CH4/CO2 gas mixtures in a microwave plasma deposition reactor. Optimum growth of well-faceted polycrystalline diamond occurs at approximately 50% CO2/50% CH4 with a growth rate of approximately 1μmh−1 for a process pressure of 45Torr and 1kW applied power. Optical emission spectroscopic studies of CH4/CO2 microwave plasmas have been performed for a range of different...
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