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In order to study the physics mechanism of surface etching process in low pressure plasmas, we propose a method to optimize etching yield model, which combines optimization technology with surface evolution algorithm. In plasma etching process, the surface effect of the ions are controlled by etch yield which may be measured by the elaborate experiment. But measuring tool or instrument affect measuring...
Electric fields with double compensatory anticathode in the sea were formulated and simulated on the basis of one compensatory anticathode mathematical model and distribution of electric field was analyzed. Number position and current of compensatory anticathode were optimized base on evolutionary programming arithmetic; also electric fields compensated and uncompensated were compared. It shows that...
This paper presents a PBIL algorithm based on adaptive theory-giving that the traditional reduction of rough set is not unique and the process lasts for a long time. The learn probability and mutation rate of traditional PBIL algorithm can change adaptively by introducing the Systemic Entropy, then a self-learning and adaptive variability PBIL algorithm (APBIL) is formed. When it is applied to attributes...
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