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In the present work, we have studied the nano/micro-patterning of the surface of NiO thin films on different substrates (SiO 2 , Si and Al) using 100 MeV Ag ions at LN 2 temperature and at an incidence angle of 75 ° with the beam axis. The surface morphology of the irradiated surface is observed by Atomic force microscopy (AFM). AFM images of ion beam irradiated samples show...
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