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Amorphous silicon oxycarbide (a-SiCxOy) films that displayed blue luminescence were fabricated using very high frequency plasma-enhanced chemical vapor deposition (VHF-PECVD) at a temperature of 250°C. The effects of thermal annealing on the photoluminescence (PL) were investigated. Thermal annealing at 600°C resulted in a remarkable enhancement in the blue PL, which was clearly observed with the...
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