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High rate pulsed DC magnetron sputtering has been used to fabricate thin film CdTe photovoltaic devices. Fabrication of thin film photovoltaic devices using magnetron sputtering has the advantages of excellent coating uniformity and use of lower substrate temperatures during deposition. The CdTe and CdS layers were deposited from compound targets. The substrates were held at 200°C during deposition,...
Thin film CdTe was deposited by pulsed dc magnetron sputtering. Magnetron sputtering offers significant advantages for the deposition of thin film photovoltaic including low deposition temperatures and excellent coating uniformity. However the films are susceptible to stress due to the relatively high deposition energy. In this study, deposition temperature and argon gas flows have been used to minimize...
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