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This paper presents a vibrating micro-resonator using transimpedance amplifier (TIA) for gyroscope applications. First, a gyroscope model is built for sensor design. The critical parameters are optimized by theoretical calculation and fine tuned by finite-element-analysis (FEM). Then, SOG-bulk micromachining and deep reactive ion etching (DRIE) are adopted to fabricate the gyroscope with high aspect-ratio...
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