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The irradiation effect in Ni 3 N/Si bilayers induced by 100MeV Au ions at fluence 1.5×10 14 ions/cm 2 was investigated at room temperature. Grazing incidence X-ray diffraction determined the formation of Ni 2 Si and Si 3 N 4 phases at the interface. The roughness of the thin film was measured by atomic force microscopy. X-ray reflectivity was used to...
The annealing effects over a range of temperatures of the titanium film (90nm) grown on Si(111) by electron gun evaporation technique were investigated using physical and electrical measurements. Grazing Incidence X-ray Diffraction experiment shows a stable titanium disilicides formation at higher annealing temperature. The depth profiling data using X-ray Photoelectron Spectroscopy show that the...
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