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Crack-free Yttrium iron garnet (Y3Fe5O12, YIG) thin films were successfully deposited on Si/SiO2 substrates by RF magnetron sputtering, through controlling the annealing temperature and cooling rate during post-annealing process. The annealing condition dependences of crystallinity, microstructures and magnetic properties of YIG films were investigated. With the increase of the annealing temperature,...
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