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Three different Czochralski (CZ) techniques, referred to as normal, cusp magnetic field (CMF) and electromagnetic field (EMF) methods, were used to grow CZ-Si crystals, respectively. The behavior of defects in these grown CZ-Si crystals was systematically investigated by a new defect detection method of multi-chroic infrared light scattering tomography. Research results showed that the defect density...
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