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In this study, influence of carbon impurities on characteristics of ALD-YSZ films is systematically investigated. Carbon concentration in ALD-YSZ films was controlled by changing Y2O3 ratio in YSZ super cycle. To examine electrochemical characteristics of ALD-YSZ films, nano-porous templates based thin film solid oxide fuel cells (TF-SOFCs) were fabricated with ALD-YSZ thin film electrolyte and examined...
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