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A one-step route was developed to fabricate Cu(In,Ga)Se 2 (CIGS) absorber layers by direct magnetron sputtering from a single quaternary target with the composition of CuIn 0.75 Ga 0.25 Se 2 . The effects of the substrate temperature, the working pressure and the sputtering power on the morphology and phase structure of the CIGS layers were studied using scanning electron...
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