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A solid-state gas sensor with the structure of Pt micro grid (sensing electrode)/ LaF3 (solid electrolyte)/ Sn, SnF2 (reference electrode) was developed for detecting oxygen at room temperature. In the oxygen sensor, Pt micro grid with the thickness of 60nm was fabricated on one side of the solid electrolyte (LaF3) wafer by lift-off process, which was used as a novel structure of sensing electrode...
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