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We demonstrated a new type of vibrational energy harvester based on an electric double layer (EDL) electret. By mechanically modulating interfacial area between vibrating electrode and the EDL electret, the electrode is electrostatically charged and discharged at different phases and electric current is generated. Owing to extremely large capacitance of the EDL electret, vibrational energy harvesters...
This paper reports the low-phase noise performance of the VCO (Voltage Controlled Oscillator) using the digital MEMS varactors with the MIM (Metal-Insulator-Metal) capacitors and an electrostatically actuated contact switch. A packaged 2-bit MEMS varactor was operated at 35 V dc to alter the capacitor values in four different states ranging from 0.55 pF to 0.73 pF with a 0.06-pF-step at 1 GHz. A 2-bit...
A micro electro mechanical system (MEMS) switch is one of the most promising MEMS applications. It is almost the ideal switching device with superior performance in comparison to conventional semiconductor switching devices. The remaining issue is its short lifetime due to the failure of the contact. Therefore, we examine degradation mechanisms at the mechanical contact point in the MEMS switch by...
High-frequency electromagnetic-field simulation HFSS has been performed on sub-millimeter scale split-ring resonator (SRR) metamaterials to propose electrostatically tunable THz frequency filters with integrated RF-MEMS variable capacitors and switches.
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