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Ion-induced damage in strontium titanate (SrTiO 3 ) has been investigated using 1.0MeV Au ions at 150K and room temperature. Rutherford backscattering spectrometry using 2.0MeV He + beam was carried out along the 〈100〉 direction to study crystalline damage and the accumulation behavior. Damage accumulation has been determined as the relative disorder on the Sr and Ti sublattices at...
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