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In this report, we discuss the possibilities of successive ionic layer deposition (SILD) method for surface modification of nano-scaled SnO 2 films by nanoclusters or nanolayers of Cu-, Fe-, Mn-, and Co-oxides. These elements are widely used for improvement of gas-sensing characteristics of metal oxide gas sensors. Samples of SnO 2 films with thickness (30-50 nm) were deposited by...
This paper reports the influence of In 2 O 3 film structure on gas-sensing characteristics measured in steady state and transient modes. Films were deposited by spray pyrolysis from InCl 3 -water solutions. Correlation between gas-sensing parameters and structural parameters such as film thickness (20-400 nm), grain size (10-70 nm), refractive index and film texture (I(400)/I(222))...
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