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A columnar TiN film under contact loading fails by shear fracture along inter-columnar boundaries. To deconvolute inter-columnar fracture strength from load–displacement curves, nanoindentation experiments were carried out on columnar ∼1.4μm thick TiN films deposited on steels of various hardness, using a Berkovich indenter. A model, which is developed based on the shear-fracture driven deformation...
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