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We first report a fabrication technique of nanoscale speckle patterns on polymers using broad ion beam milling. The proposed technique is simple and low-cost to produce speckles ranging from dozens of nanometers to less than three micrometers in a large area of several millimeters. Random patterns were successfully produced with an argon (Ar) ion beam on the surfaces of four kinds of polymers: the...
This paper explores the planar arrangement feature of the copper interconnects in a view field of several millimeters by the focused ion-beam (FIB) Moiré inversion method quantitatively. The curved FIB Moiré patterns indicate that the copper interconnects are a series of curves with continuous variations instead of beelines. The control equation set of the copper interconnects central lines is attained...
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