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Developments of ultra fine pitch and high density solder microbumps and assembly process for low cost 3D stacking technologies are discussed in this paper. The solder microbumps developed in this work consist of Cu and Sn, which are electroplated in sequential with total thickness of 10 mum; The under bump metallurgy (UBM) pads used here is electroless plated nickel and immersion gold (ENIG) with...
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