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Filters operated at high power levels and comprising BAW resonators produce 2nd harmonic emissions. To model the emissions of a BAW resonator, Feld and Shim constructed a nonlinear Mason model, which implements an “extended” pair of piezoelectric constitutive equations containing arbitrary 2nd order terms: T = cES − eE + [1/2δ3cES2 − δ1eSE + 1/2δ2εSE2] D = eS + εSE + [1/2δ1eS2 − δ2εSSE +1/2δ4εSeE2...
Nonlinear behaviors of bulk piezoelectric devices have been widely studied. Nonlinear circuit models, such as a nonlinear version of Mason's model, have been developed to model the 2nd harmonic emissions (H2) and intermodulation response (IMD3) of piezoelectric resonators. Such resonators comprise a piezoelectric film sandwiched between two metal electrode films. The layer thicknesses and material...
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