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This paper presents a digital closed loop control method for the sense mode of a mode-matching MEMS vibratory gyroscope. The sense closed loop system reported in our previous work is relatively complex and unreliable due to the existence of notch filter. In this work, a more simple and robust control system is realized with the help of mode-matching control. With a tuning voltage automatically applied...
The electrostatic negative-stiffness behavior of vertical structures under out-of-plane motion decreases the resonant frequency and deteriorates the linearity of a lateral-axis tuning-fork gyroscope (TFG). An electrostatically isolated silicon island is proposed to suppress this behavior. The negative-stiffness behavior is observed and the effectiveness of the electrostatic isolation is experimentally...
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