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TiO2 powders have been successfully synthesized by atmospheric pressure plasma jet (APPJ), which operates by feeding air between two coaxial electrodes that are driven by a 20.8kHz power source. Tetrachloride titanium is mixed with the effluent of the plasma jet in deferent regions to produce TiO2 powders. The synthesized samples were analyzed by X-ray diffraction (XRD) and scanning electron microscopy...
Self-limiting deposition of aluminum oxide (Al2O3) thin films were accomplished by the plasma-enhanced chemical vapor deposition using trimethyl aluminum (TMA) and O2 as precursor and oxidant, respectively, where argon was kept flowing in whole deposition process as discharge and purge gas. In here we present a novel plasma source for the atomic layer deposition technology, magnetized radio frequency...
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