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We report the first experimental demonstration of a novel piezoelectric actuated microelectromechanical systems (MEMS) tunable vertical-cavity surface-emitting laser (VCSEL). A large physical deflection was obtained with the piezoelectric actuated MEMS cantilever beam monolithically integrated with the VCSEL distributed Bragg reflector. Single-mode emission and continuous tuning were achieved at room...
Summary form only given. The ability to understand predict, and interpret fabrication yield is extremely important for efficient and cost-effective manufacturing. Here, we present a yield theory derived from simple fundamental equations. This theory is compared with a large number of sets of experimental data, including threshold current, voltage, and wavelength distributions of both vertical-cavity...
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