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Patterning with ion beams at the nanometer scale has found various important applications in optoelectronics and nanofabrication. During the process of focused ion beam milling, many different effects occur simultaneously, including sputtering, material redeposition, and implantation. Based on the powerful and versatile capability of the focused ion beam technique, we propose a novel method to fabricate...
In this work, we show the fabrication of nanocrescent arrays with different sizes. We also investigate the optical response of such nanocrescent arrays and perform theoretical calculations. Our approach may find extensive applications in nanophotonics and integrated optics.
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