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ZnO:Gd films with (100) preferred orientation were deposited on glass substrates by reactive radio frequency magnetron sputtering with the deposition temperature of 100–500°C. The (100) texture of the ZnO:Gd film is enhanced with the increase of deposition temperature. The average transmittance of the ZnO:Gd films in the visible region is over 83% and the film deposited at 500°C exhibits the highest...
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