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The fluorine doped amorphous carbon nanoparticles (a-C:F NPs) films with sizes 50–100nm were deposited on polyethylene terephthalate in an atmosphere of CF 4 by a 90°-bend magnetic filtered cathodic arc plasma system. The surface morphology of a-C:F NPs films was observed by field emission scanning electron microscope and atomic force microscope. The microstructure and chemical bonding nature...
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