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Two kinds of new silicon actuators, cantilever and twisted-beam, based on pn diode actuation principle are presented. The space gap that is absolutely needed in conventional electrostatic MEMS actuators is replaced by a depletion layer in reversely-biased pn diode. The strong electric field generated in the depletion layer forces a silicon microstructure to vibrate. The microstructure causes a large...
In order to clarify the source of resonant frequency drift in MEMS resonators, thermal expansion effect of packaging on MEMS devices was investigated. The strain in a silicon plate bonded on an aluminum plate with temperature was precisely measured. Increasing amount of strain in the aluminum plate was as large as 200 micro-strain with increase in only 20 degrees of temperature. The strain in the...
This paper reports on the development of a new integrated laser Doppler blood flow microsensor and its application for monitoring the blood flow of chickens as an important factor in preventing avian influenza infection. To enable the attachment of the blood flow sensor to chickens without making the attachment felt, we have developed the world's smallest size (1/1000 the weight of a commercial blood...
The fabrication of WOW (wafer-on-a-wafer) with MEMS technology has been developed. A wafer was thinned and stacked on a base wafer. After the TSVs were patterned on the thinned wafer, they were filled by Cu for interconnection. The wafers were bonded with benzocylcobutene (BCB, CYCLOTENETM) as an adhesive material. The BCB layer was also acted as a dielectric layer between top and bottom silicon wafers...
This paper discusses biomimetic water strider robots that have microfabricated hydrophobic legs. Various kinds of supporting legs with hydrophobic microstructures on their surfaces were developed using MEMS (micro electromechanical systems) techniques. The lift and pull-off forces of these supporting legs were analyzed theoretically and then measured. The experimental results were in good agreement...
We have developed a new electrostatic actuator consisting of multilevel structure, which can move in a long distance with no need of a high driving voltage. This actuator features to have a built-in upward-deflection. We have also developed a variable capacitor, which can be controlled with a capacitance ratio (C/R) higher than 10 using a new configuration of the actuators and capacitor plates. The...
In this paper, we propose a novel variable capacitor having higher capacitance ratio (C/R) >35 than ever before. So far, various types of RF-MEMS variable capacitors have been proposed, but even the highest C/R among the capacitors under development is now the order of 4. For enabling the multi-band of the wireless terminal, it has been expected to achieve a device having higher C/R. We demonstrate...
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