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In this paper, the polycrystalline CexPr1-xB6 (0≤x≤0.6)) bulks were successfully fabricated by spark plasma sintering (SPS). A lot of experiments are conducted to testing the mechanical and emission properties. The technological applications parameters are following: the sintering temperature is 1450°C, the sintering pressure is 50 MPa and the holding time is 5 min. The maximum pulse thermionic emission...
As the optical alignment system for lithography cannot be compatible with the equipment and the manufacturing process in nanofabrication with scanning probe microscope, new precision alignment methods are required. In this paper, we investigated ultra-precision alignment system especially to the overlay in SPL technology and completed the fabrication of two-layer graphics by AFM oxidation. On the...
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