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Pt–Mo coated system annealed at 1050°C for 24h was investigated using several analytical techniques with high resolution (SEM/EDX, μ-PIXE, RBS and XRD). These techniques provide structural and compositional data throughout the material depth and probing area. The results depend on the applied beam, its energy and size. They contribute to a better understanding of thermal annealing effects on the solid-state...
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