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This paper presents a 500–750 GHz waveguide based single-pole single-throw (SPST) switch achieving a 40% bandwidth. It is the first ever RF MEMS switch reported to be operating above 220 GHz. The switch is based on a MEMS-reconfigurable surface which can block the wave propagation in the waveguide by short-circuiting the electrical field lines of the TE10 mode. The switch is designed for optimized...
This paper presents a 500–600 GHz submillimeterwave MEMS-reconfigurable phase shifter. It is the first ever RF MEMS component reported to be operating above 220 GHz. The phase shifter is based on a micromachined rectangular waveguide which is loaded by 9 E-plane stubs, which can be individually blocked by using MEMS-reconfigurable surfaces. The phase-shifter is composed of three metallized silicon...
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