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A Hetero Acoustic Layer (HAL) SAW device is a new type of SAW device with a solidly mounted monocrystalline piezoelectric thin plate, which can obtain very high impedance ratio (ZR) and small temperature coefficient of frequency (TCF) at the same time. In this study, HAL SAW resonators using a LiTaO3 (LT) thin plate and a quartz substrate were investigated numerically and experimentally. The resonator...
Surface acoustic wave (SAW) resonators with a moderate bandwidth and a large impedance ratio are obtained by Hetero Acoustic Layer (HAL) structure combing a LiTaO3 (LT) thin plate and the substrate, which has a high velocity of leaky SAW and a small frequency temperature coefficient (TCF). In this study, a new type of HAL SAW resonators were fabricated using 0.5-1 μm thick 42oYX or 20oYX LT and 42...
SAW device is widely used in the various passive sensing application such as temperature, mechanical force and other various measurements. The SAW devices have relatively high the temperature dependency, thus in some applications, the multiple SAW sensors are used for the temperature compensation. In such a case, the communication between the sensor and controller is highly important. This paper describes...
A Lamb wave sensor to measure the concentration of methanol solution in direct methanol fuel cell (DMFC) systems was designed, fabricated and evaluated. The sensor piezoelectrically generates the lowest antisymmetric mode (A0-mode) Lamb wave on a suspended thin AlN/SiO2/Si composite membrane, and confines a standing wave with edge reflectors. The fabricated sensor showed an almost constant sensitivity...
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