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Surface acoustic wave (SAW) resonators with a moderate bandwidth and a large impedance ratio are obtained by Hetero Acoustic Layer (HAL) structure combing a LiTaO3 (LT) thin plate and the substrate, which has a high velocity of leaky SAW and a small frequency temperature coefficient (TCF). In this study, a new type of HAL SAW resonators were fabricated using 0.5-1 μm thick 42oYX or 20oYX LT and 42...
First anti-symmetric (Ai) mode Lamb wave propagating in a LiTaO3 thin plate at an Euler angle around (0°, 45°, 0°) has a high velocity. Both phase velocity and electromechanical coupling factor have been evaluated at different propagation angles (0°, 45°, ψ°). A1 mode Lamb wave at (0°, 45°, 0°) offers the highest velocity and largest electromechanical coupling factor, thus proving suitable for high...
The Lamb waves and horizontal shear waves' propagation in LiTaO3 thin plate is investigated as a function of Euler angles. Both velocity and electromechanical coupling factor largely depend on the plate's thickness. Around (0°, 30°, 0°), LiTaO3 thin plate has a high velocity and a suitable coupling factor for a high frequency filter. Authors fabricated A1 mode Lamb wave resonators in (0°, 39°, 0°)...
A prototyped bandwidth-tunable filter consisting of SAW resonators and BaSrTiO3 (BST) varactors is discussed in this paper. In general, the BST varactors require high deposition temperature (>600°C) in order to obtain good varactor performances. Thus special cared wafer integration process of BST varactors onto a 42°YX-LiTaO3 wafer was newly developed to prevent performance deterioration in SAW...
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