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Aluminum with Sn intermediate layer shows very large deformation even below 400°C. Using this new layer structure as sealing metal, high yield hermetic package of MEMS was demonstrated at only 370°C without any treatment of surface oxide removal. During bonding, the bonding metal is significantly pressed (the reduction rate of thickness ∼90%), which guarantees hermeticity at high yield. Based on SEM,...
First anti-symmetric (Ai) mode Lamb wave propagating in a LiTaO3 thin plate at an Euler angle around (0°, 45°, 0°) has a high velocity. Both phase velocity and electromechanical coupling factor have been evaluated at different propagation angles (0°, 45°, ψ°). A1 mode Lamb wave at (0°, 45°, 0°) offers the highest velocity and largest electromechanical coupling factor, thus proving suitable for high...
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