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We report the characteristics of HfO2/Al2O3 gate dielectric nanometer-stacks deposited on InAlAs at 245 °C by atomic layer deposition. The annealing effect on the interface and electrical properties of stack films was investigated by X-ray photoelectron spectroscopy, and electrical measurements. It is demonstrated that the resultant of As2O3 during annealing is suppressed by Al2O3 layer. The annealed...
We report a low-cost method that allows silicon molds to directly imprint metals and achieve high-fidelity pattern transfer with vertical sidewalls and ultra-high resolution. Large-scale extraordinary light transmission through silver apertures is demonstrated.
Graphene oxide/carbon nanotube (GO/CNT) films with different CNT contents were prepared by a solution-casting method. The oxygen-containing groups on the GO/CNT films were removed by thermal annealing at 200 °C and the corresponding hybrid graphene/CNT films were obtained. The graphene/CNT films have good mechanical and electrical properties as well as high stability in electrolyte due to the combination...
Love-mode immunosensors based on ZnO/36degYX-LiTaO3 structures are studied. The ZnO films are grown on the 36degYX-LiTaO3 substrates by RF magnetron sputtering technique. The crystalline structures of the ZnO films are investigated by the X-ray diffraction (XRD) analysis, which show that the highly orientated (002) films are obtained. Then the Love-mode sensors are fabricated for monitoring antibody-antigen...
A kind of hydrogen sensors based on Rayleigh wave devices is presented. Generally, the Rayleigh wave devices are covered by a sensitive layer, such as WO3, to absorb hydrogen, which can be deposited by Sol-gel method or RF magnetron sputtering method. In the sensing experiment, frequency shift and/or insertion loss variation of the sensors exposed to H2 with different concentrations are measured at...
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