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CrN/ZrN multilayer coatings with various Cr/Zr chemical compositions ratio were fabricated by a cathode arc deposition system. The Cr/Zr atomic ratios of the CrN/ZrN multilayer coatings were controlled, ranging from 1 to 2.5. The chemical composition of CrN/ZrN multilayer thin films was determined by a field emission electron probe microanalyzer (FE-EPMA). The phase composition of multilayer coatings...
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