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A sophisticated SoC chip that incorporates many design modules including 2 ARM-like CPUs, a dynamic voltage and frequency scaling (DVFS) design, a master/slave temperature sensing system, and an on-chip test/debug platform is developed and implemented with TSMC 90 nm technology. Measurement results validate the functions and efficiencies of the whole chip.
A cutting-edge ovenized micromechanical resonator circuit comprised of a double-ended tuning fork (DETF) resonator and serpentine-shaped heaters to enable ultra-low heater power of only 0.47 mW over the entire temperature range (−40°C to 85°C) has been reported for the first time in a low-cost, foundry CMOS-based fabrication platform. The combination of low thermal conductivity materials (i.e., SiO...
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