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Electrostatically actuated torsional micromirror fabricated using MicroElectroMechanical Systems (MEMS) technology is a fundamental building block for many optical network applications, such as optical wavelength-selective switch, configurable optical add-drop multiplexers and optical cross-connects. A two-dimensional (2D) micro-mirror functioning with a flexible secondary tilting offers tremendous...
Electrostatically actuated MicroElectroMechanical Systems (MEMS) based micromirror is a fundamental building block for a variety of optical network applications, such as optical wavelength-selective switching, add/drop multiplexing, and optical cross-connecting. A two-dimensional (2D) micro-mirror functioning with a flexible secondary tilting offers tremendous value for the network designers. This...
An electrostatic micromirror is designed and fabricated using a standard MicroElectroMechanical Systems (MEMS) process. Active control approaches are proposed for driving actuation to eliminate micromirror ldquopull-inrdquo achieving enhanced device performance and functionality.
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