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Pb(Zr 0.4 Ti 0.6 )O 3 [PZT(40/60)] films were deposited onto LaNiO 3 (LNO) coated Si substrates by metal-organic decomposition (MOD) technique. Excess Pb was incorporated in the film by using excess Pb (2%–15%) in the solution. The crystallinity and ferroelectric properties of PZT films were investigated by using X-ray diffraction (XRD), RT66A test system and HP4194...
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