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Because of the everlasting promotion of micro/nanofabrication techniques, the measurement of the feature contour of micro/nanofabricated structures becomes an important issue. Atomic force microscopy (AFM) is a high accuracy measurement instrument that has been frequently used in measuring of micro/nanofabricated structures. However, most conventional AFM systems use a single probe with a monotonic...
Atomic force microscopy (AFM) is a powerful technique to provide high resolution, three-dimensional data for measuring topography of samples. However, the scanning range of conventional AFM systems hardly exceeds hundreds of micrometers due to the piezoelectric actuation. In this research, we develop a large scanning-range AFM system with a z-scanner separated from the xy-scanner. The z-scanner actuated...
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