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This paper presents a dynamic electro-thermal model for the V- and Z-shaped electrothermal microactuator for the first time. The model predicts the dynamic temperature responses of the actuator operating in vacuum conditions with constant input voltage applied at both ends. Dynamics of the temperature distribution are established, and the exact solution of the hybrid partial differential equation...
This paper presents the use of a monolithic, force-feedback MEMS (microelectomechanical systems) microgripper for characterizing both elastic and viscoelastic properties of highly deformable hydrogel microcapsules (15-25 mum) at wet state during micromanipulation. The single-chip microgripper integrates an electrothermal microactuator and two capacitive force sensors, one for contact detection (force...
This paper presents the first demonstration of force-controlled micrograsping at the microNewton force level. The system manipulates highly deformable biomaterials (hydrogel microcapsules and biological cells) in an aqueous environment using a MEMS-based microgripper with integrated force feedback along two axes. The microgripper integrates an electrothermal V-beam microactuator and two capacitive...
Nanomanipulation in space-limited environments (e.g., inside SEM, and particularly in TEM) requires small-sized nano manipulators that are capable of producing sub-nanometer positioning resolutions and large output forces. This paper reports on a millimeter-sized MEMS (microelectromechanical systems) based nano manipulator with a positioning resolution of 0.15 nm and a motion range of plusmn2.55 mum...
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