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The highly efficient antireflective down-conversion Bi-doped Y2O3 films have been deposited on the (100) oriented Si and quartz substrates by rf reactive magnetron sputtering using a metallic target. The effects of the Bi doping concentration on the optical and structural properties of the films were studied. The Bi/Y ratio in the films varied from 0.002 to 0.02. The undoped Y2O3 films show a cubic...
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