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Lead zirconate titanate (PZT) thin films of thickness 420 nm were deposited on Pt/Ti/SiO 2 /Si substrate using a spin coating sol–gel precursor solution, and then annealed using 2.45 GHz microwaves at a temperature of 450 °C for 30 min. The film has a high perovskite content and high crystallinity with a full width at half maximum of 0.35°. The surface roughness of the PZT thin film was 1...
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