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Defining the position of an object on a planar substrate by force sensors is a common technology nowadays. Many products are commercialized worldwide, which make use of force sensors, especially, for instance, touchpads. Here advanced lithography processes together with piezoelectric materials are demonstrated to fabricate an extremely high resolution force sensor. The approach combines a large array...
Force position arrays which are able to track the position of micro‐ or nanometer‐sized objects require an extremely high spatial resolution down to the nanometer range. On page 191, Kittitat Subannajui, Andreas Menzel, Margit Zacharias, and co‐workers report methods which combine advanced lithographic processes and piezoelectric materials on a large scale. The structures are achieved by phaseshift...
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